Abstract: The invention relates to the technical field of laser interference measurement, and specifically relates to a multi-light-beam cascading staircase angle reflector laser interferometer. The multi-light-beam cascading staircase angle reflector laser interferometer comprises a laser source, a beam splitter mirror, a staircase plane angle reflector mirror, a movable angle reflector, a photoelectric detector set and a micro-moving platform; the reflecting surface of the staircase plane angle reflector mirror is composed of n staircase planes; the space between two adjacent reflecting surfaces is shown in the specification (k is a natural number); the laser source can generate a plurality of parallel lasers; the photoelectric detector set is equipped with n photoelectric detectors which alternatively enter the maximum laser interference state or the minimum laser interference state during the laser interference measurement, and the measurement precision is shown in the specification. According to the multi-light-beam cascading staircase angle reflector laser interferometer, the counting can be carried out only under the condition that multi-light-path interference states alternatively vary during measuring, namely, an AC signal is introduced during multi-light-path interference measurement; the measurement of the DC level in the traditional laser interference measurement is converted into the AC signal measurement, and thus the interference resistance of an interference instrument can be improved.
|