CN200810071868
CN101372327A
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摘要：一种碳纳米管阵列的生长方法,涉及一种碳纳米管,尤其是涉及一种低能耗、无炉生长超长碳纳米管阵列的方法。提供一种碳纳米管阵列的生长方法。提供一基底,在该基底上表面依次溅射一层缓冲层和一层催化剂层,得上表面溅射有一层缓冲层和一层催化剂的基底;将上表面溅射有一层缓冲层和一层催化剂的基底放在加热片上;启动微区加热控制电源,直接以加热片为加热装置对基底加热;通入载气和碳源气;关闭微区加热控制器电源,将基底取出,得到样品。
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Abstract： A method for growing a carbon nanotube array relates to a carbon nanotube, in particular to a furnace-free method for growing a very long carbon nanotube array with low energy consumption. The invention provides a method for growing a carbon nanotube array. A substrate is provided, a buffer layer and a catalyst layer are sputtered successively on the surface of the substrate to obtain the substrate with the top surface sputtered with the buffer layer and the catalyst layer; the substrate with the top surface spurted with the buffer layer and the catalyst layer is put on a heating element; a micro-area heating control power supply is switched on, the heating element is directly taken as a heating device to heat the substrate; a carrier gas and a carbon source gas are filled in; then the micro-area heating control power supply is switched off, the substrate is taken out to obtain a sample.
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申请人： 厦门大学
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Applicant： UNIV XIAMEN[CN]
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地址： 361005福建省********(隐藏)
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发明(设计)人： 谢素原 马春印 林水潮 江智渊 黄荣彬 郑兰荪
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Inventor： SUYUAN XIE[CN]; CHUNYIN MA[CN]; SHUICHAO LIN[CN]; ZHIYUAN JIANG[CN]; RONGBIN HUANG[CN]; LANSUN ZHENG[CN]
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主分类号： C01B31/02
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分类号： C01B31/02 C23C14/34 C23C14/06
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