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摘要：本发明涉及一种具有微结构的模芯,包括模版和设置在模版一面的微结构,模芯具有各向异性刻蚀率,微结构包括至少一个凸起或者至少一个凸条,凸起或凸条的侧面与模版底面之间的夹角相同。本发明还涉及一种具有微结构的模芯的制造方法,包括:在具有各向异性刻蚀率的模版上涂布光刻胶;在掩模板的遮掩下曝光模版上的光刻胶;去除模版上被曝光的光刻胶;刻蚀模版表面未被光刻胶覆盖的区域,形成具有至少一个凸起或者至少一个凸条的微结构;去掉模版表面上残留的光刻胶,形成具有微结构的模芯。本发明有效降低了制造具有微结构的模芯的成本,同时简化了模芯的制造方法。本发明有效降低了制造具有微结构的模芯的成本,同时简化了模芯的制造方法。
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Abstract： This invention relates to a sort of core rod which has the microstructure, and it consists of the stencil and the microstructure which is fixed in the one side of the stencil. The core rod has each aspect of the isomerism etching rate, and the microstructure consists of a heave at least and a protruding bar at least. The included angle which is between the flank of the heave or the protruding bar and the bottom of the stencil is homology. This invention also relates to a sort of manufacturing method of the core rod which has the microstructure, and it includes that: imbrue the light-sensitive lacquer to the stencil which has each aspect of the isomerism etching rate, expose the light-sensitive lacquer of the stencil in the cloak of the mask plate, wipe off the light-sensitive lacquer which is exposed and which is in the stencil, chisel the area which is in the surface of the stencil and which is not covered by the light-sensitive lacquer, form the microstructure which has a heave at least and a protruding bar at least, wipe off the rudimental light-sensitive lacquer which is in the surface of the stencil, and from the core rod which had the microstructure. This invention debases the cost that it manufactures the core rod of the core rod which has the microstructure availably, and at the same time it predigests the manufacturing method of the core rod.
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申请人： 京东方科技集团股份有限公司
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Applicant： BOE TECHNOLOGY GROUP CO LTD[CN]
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地址： 100016北京市********(隐藏)
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发明(设计)人： 刘敬伟 王刚
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Inventor： JINGWEI LIU[CN]; GANG WANG[CN]
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主分类号： G03F7/00(2006.01)I
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分类号： G03F7/00(2006.01)I
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